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STACIS 4c BETA

  • Overview +


    STACIS® 4c is part of the most advanced active vibration isolation system commercially available. Using inertial sensors, advanced control algorithms, and piezoelectric actuators, STACIS cancels vibration in real time by measuring floor motion and adjusting actuators to counteract it.  STACIS 4c takes all of the STACIS 4 series performance and packs it into a 40% shorter package to accommodate short head-height applications and 12"(300mm) raised floors.  

    STACIS 4 vs STACIS 4C

    Initially designed to isolate precision microlithography, metrology, and inspection equipment in advanced semiconductor factories, STACIS is now the industry standard solution for the most sensitive instruments in noisy environments, including but not limited to applications such as, failure analysis, nanotechnology research, nanofabrication, structural biology, and materials research.

    STACIS 4c includes a new and improved, lower noise, digital controller, the DC-2020 with a dual-core processor. This new advanced control system provides the user with an easy to use Graphical User Interface (GUI).

    STACIS 4 series builds on the superior architecture of previous generations by adding advanced control algorithms and new patented technologies. The results are previously unachievable vibration cancellation of building floor vibration at all frequencies, but particularly below 10Hz, where high resolution imaging and metrology is most sensitive. When combined with patented FloorSense™ technology, the STACIS 4 series reduces building floor vibration by 60dB at 2Hz and 27dB at 1Hz. Full performance specifications for STACIS 4c are included below.

  • The STACIS 4c Advantage +


    Hundreds of times stiffer than air isolators, STACIS overcomes limitations of air vibration isolation systems. There is no "soft" suspension and, unlike active air systems, STACIS can be placed beneath a tool with an internal active air isolation system with both systems fully optimized.

    The unique serial design and proprietary high-force piezoelectric technology results in a wide active bandwidth from 0.2Hz to 150Hz and unmatched active isolation with up to 99.9% vibration reduction at 2Hz.

    Even greater vibration control than STACIS IIIc, STACIS 4c improves vibration control at 2Hz by up to 60dB over the industry standard solution.

    Robust serial design allows you to set it and forget it, unlike competitive parallel designs that are inherently unstable and need frequent tuning to maintain peak performance. In addition STACIS 4c allows for two stage vibration control designs incorporating passive or active parallel platforms on top of the STACIS system. Two stage designs are becoming more common as instruments are forced to finer resolutions. 

    STACIS 4c performance is the equivalent of reducing your vibration environment by up to 5 VC curves on a stable floor. In addition this performance gives users the flexibility to install instruments in less than ideal vibration environments, allowing more flexibility in facility layout and design.


  • STACIS® 4c BETA PROGRAM FREQUENTLY ASKED QUESTIONS (FAQs) +


    1. What is the TMC STACIS 4c BETA Program?
    The TMC STACIS 4c BETA Program is an early-access initiative that allows qualifying customers to begin using and evaluating the latest version of the STACIS 4c platform. Participants can explore new features and provide feedback.  

    2. Who is eligible to participate in the BETA Program?
    The program is open to existing and prospective TMC customers who are interested in installing STACIS 4c in their facility, and who are willing to actively work on the platform and provide structured feedback.

    3. What are the goals of the BETA Program?
    Validate product functionality, performance and reliability in real-world scenarios, gather customer feedback on usability and performance, optimize its delivery, and help customers adopt and evaluate product success.

    Key Program Highlights

    4. What benefits do BETA participants receive?
    Early access to STACIS 4c product advantage, direct engagement with TMC product and support teams, opportunity to influence product enhancements, accelerated onboarding experience ahead of GA release.

    5. What features are included in the BETA?
    Participants will have access to complete STACIS 4c functionality, including user interface and workflow experience, quality reporting and analytics, and improved system integrations, performance and improvements.

    6. Will participants receive onboarding support?
    Yes. BETA participants will receive guided installation and onboarding, including setup assistance, access to documentation and training materials, and dedicated points of contact for support.

    Program Rules & Expectations

    7. What are the expectations for BETA participants?
    Participants are expected to actively use the platform in the BETA period, provide timely and constructive feedback, and participate in check-ins, surveys, or feedback sessions, report bugs or issues encountered

    8. Is the BETA environment production-ready?
    The BETA product is ready for full production use. It may contain features or defects, and performance may vary, but the product has passed all production level testing and quality standards.

    9. Can BETA participants use real customer or business data?
    It is recommended to use test or non-sensitive data initially, if possible. If real data is used, participants must ensure compliance with their internal data governance and security policies.

    10. Are there any limitations on use?
    Yes. Limitations will be within normal specifications and use.

    Support & Feedback

    11. How do participants submit feedback or report issues?
    Feedback can be submitted through designated TMC feedback portals or forms, direct communication with assigned TMC Support contacts, and/or scheduled review sessions.

    12. Will feedback influence the final product?
    Yes. Customer input is a critical component of the BETA Program and will directly inform future STACIS product enhancements and prioritization.

    Timeline & Participation

    13. How long does the BTA Program last?
    The BETA Program runs for a limited time during the release period. Exact timelines will be communicated to participants.

    14. Can participants exit the program early?
    Yes. Participants may opt out of the BETA Program at any time by notifying the program team.

    15. What happens after the BETA ends?
    Feedback collected will be reflected in future point releases. Additional training and support will be provided as needed.

    Legal & Compliance

    16. Are there any confidentiality requirements?
    There are no requirements.

    17. Is there a cost to participate?
    Pricing details (if applicable) will be communicated as part of the program and a signed agreement.

    Getting Started

    18. How can I enroll in the BETA Program?
    Interested customers can enroll by contacting their TMC representative, completing an agreement with TMC, and meeting eligibility and readiness criteria.

    19. What do I need to get started?
    You will need to work with your TMC Sales representative as your point of contact and agree to participate in the program and to its terms as outlined by TMC.  

    Additional Notes

    20. What should participants keep in mind?
    This is an evolving product experience. Your feedback is welcomed and essential to overall success.


  • Performance +


    4500 lbs (2045 kg) payload tested with simulated vibration at VC-C (500 μin./s, 12.5 μm/s RMS)  Vertical and Horizonal axes


    STACIS 4c Vertical Curve BETA
     
     
    STACIS 4c Curve

      

  • Specifications +


    Performance Specifications
    Active degrees of freedom 6
    Active bandwidth 0.2 Hz - 150 Hz
    Isolation at 1 Hz 85% - 96%
    Isolation at 2 Hz 96% - 99.9%
    Settling time (typical) 0.02 sec
    Internal noise <0.05 nm RMS
    Operating load range per isolator Low capacity: 400-1100 lbs (182-500 kg)
    Med capacity: 900-2100 lbs (410-955 kg)
    Hi capacity: 1900-4500 lbs (864-2045 kg)
    Stiffness (1000 lb / 454kg mass, Med capacity isolator) 40,000 lb/in. (73 x 105 N/m)
    Magnetic field emitted at maximum 4 in.(102 mm) from the isolator <0.02 μG broadband RMS
    Isolator Design, Dimensions, and Environmental and Utility Requirements
    Environmental and safety CE and RoHS compliant, designed to comply with NRTL safety certification standards
    Active isolation elements Piezoelectric elements are actuated by a high-voltage amplifier. Vertical actuators support the isolated payload.
    Passive isolation element Single isotropic hard-mount elastomer (no compressed air supply required)
    Vibration sensor elements Geophone type inertial sensors measure floor vibration and deliver a signal to the control system proportional to the velocity of vibration motion
    Active feedback control loop Floor vibration is measured, processed and attenuated below the spring supporting the isolated surface
    Isolator dimensions (WxDxH) 14.45 x 14.26 x 6.16* in.
    367 x 362 x 157* mm

    *Unloaded height. Loading may decrease height by up to 0.12 in. (3 mm). Systems with ≥4 isolators may require the addition of external wedge mounts that add 1.6 in. (41 mm) to the height.
    Isolator weight 53 lb (24 kg)
    Operating temperature 50° - 90° F
    10° - 32° C
    Storage temperature -40° - 130° F
    -40° - 55° C
    Humidity 80% Maximum at 68° F (20° C), Maximum dewpoint: 18° C
    System power requirements 100, 120, 230, 240 VAC
    50/60 Hz AC; <600 W
    CE compliant
    Isolator count per system Minimum of 3, no maximum
    Options Laminated stainless steel platforms, frames, risers, leveling devices, earthquake restraints, lift hoods
    DC-2020 Controller Specifications
    Dimensions (WxDxH) 19 x 8.5 x 1.75 in.
    483 x 216 x 45 mm
    Weight 6.3 lb (2.9 kg)
    Processor 150/75 MHz dual core
    Sampling rate 10 kHz
    Analog outputs 16 channels
    Analog inputs 16 channels
    Status light Single LED
    Front panel ports 1x serial USB 2.0
    1x serial Micro-USB
    1x Ethernet RJ-45
    2x BNC
    Rear panel ports 1x serial USB 2.0
    1x Ethernet RJ-45
    1x RS-232 DB-9 legacy serial for legacy STACIS 2100 isolators
    User interface Front panel LCD display
    Character menu on HyperTerminal
    Extended GUI for Microsoft Windows
    Embedded Ethernet GUI

  • DC-2020 Web Controller +


    STACIS active piezoelectric solutions can be controlled via an intuitive web-based user interface (Web GUI) from a web browser* on a PC - no additional software is required.

     

    The Web GUI allows users to view status, manage operation and setup, and enter diagnostic commands.

      

    Web GUI Plus

    TMC offers an enhanced version of the Web GUI for advanced users called, the Web GUI Plus. It includes additional advanced diagnostic capabilities, as well as a built-in oscilloscope that can monitor vibration input and output for each axis.

     

     

    *Chrome and Firefox officially supported. Other browsers may work as well.

  • Application Notes +


    STACIS Quiet Island Enables High-Resolution Cryo-EM

    Performance Loss in Stacked Pneumatic Isolation Systems

    Precitech Nanoform 250 Ultra combined with STACIS increases yield

    STACIS as a Microseismic Shaker

  • Application Photos +


     
    TEM on STACIS active vibration isolation platform  
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  • To Order +


    For assistance in configuring the optimum STACIS 4 solution for your specific application and facility conditions, please contact our Active Products Applications Team for assistance.
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