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SEM Base LP for Thermo Fisher

SEM-Base LP floor vibration cancellation for Thermo Fisher scientific tools

  • Overview +


    SEM-Base LP is a custom, low profile version of our standard SEM-Base active piezoelectric vibration cancellation platform. SEM-Base LP is easier to install, provides outstanding performance, and is ergonomically optimized. The compact design facilitates installation without lifting the Scanning Electron Microscope (SEM) column with anything other than the SEM’s built-in leveling feet. And, once installed, the SEM’s height above the floor does not increase. SEM-Base LP incorporates our unique STACIS piezo technology and has the same vibration cancellation performance as our industry-standard SEM-Base VI. SEM-Base LP includes casters and is designed specifically to integrate with many Thermo Fisher Scientific (formerly FEI) tools.

    SEM-Base LP on a TFS frame iso view SEM-Base LP on a TFS frame side view

    Example of how SEM-Base LP integrates with the bottom frame of the tool

  • Compatible Thermo Fisher Tool Models +


    SEM-Base LP is compatible with many Thermo Fisher Scientific models including:

    • Apreo
    • Aquilos
    • Helios 5
    • Nova NanoSEM x50
    • Prisma
    • Quattro S
    • Scios
    • Teneo
    • Verios 5
    • Versa 3D
    • Centrios

    If your SEM/FIB is not listed, contact TMC to check for compatibility.

  • The SEM-Base VI Advantage +


    Hard-Mount Technology – SEM-Base VI is compatible with all internal SEM vibration control systems and aggressively mitigates low frequency floor vibration starting at 0.6 Hz.

    Active Inertial Vibration Cancellation – SEM-Base VI uses high sensitivity, low frequency inertial velocity sensors to achieve high levels of vibration attenuation, even on quiet floors. 

    Serial Design with Piezoelectric Technology – The unique serial design and proprietary highforce piezoelectric technology results in a wide active bandwidth from 0.6 Hz to 150 Hz and unmatched, inertial active vibration cancellation with 90% reduction starting at 2 Hz.

  • Performance +



    1800 lbs (818 kg) payload tested with simulated vibration at VC-C (500 μin./s, 12.5 μm/s RMS)

  • 规格 +


    性能规格
    主动自由度 6
    主动带宽 0.6 Hz - 100 Hz
    被动固有频率 标称值为12 Hz
    有效的主动共振频率 0.5 Hz
    1 Hz时的隔振 40% - 70%
    2 Hz时的隔振 90%
    ≥3 Hz时的隔振 90 - 98%
    内部噪音 <0.1 nm RMSd>
    工作负载范围 标准承重能力：900 - 2,500磅（408 - 1134千克）
    高承重能力：2,500 - 3,200磅（1134 - 1452千克）
    磁场发射
    4英寸（102毫米）处
    距离平台    		 <0.02 μG broadband RMSd>
    设计、尺寸、环境和效用要求
    环境和安全 符合CE和RoHS标准
    主动隔振元件 最小承重能力为3300磅（1500千克）的压电致动器接收来自高压放大器的信号，其输出高达800 VDC。垂直执行器支撑隔振的有效载荷
    被动隔振元件 单个硬弹性体（无需压缩空气源）
    振动传感器元件 向下的地震检波器型惯性传感器，用于
    测量隔振器下方的地面振动，并
    提供与振动运动速度成正比的电压
    主动反馈控制回路 在支撑隔振表面的弹簧
    下方测量、处理和
    支撑隔离面
    尺寸（宽 x 深） 35.25 x 44.25英寸
    895 x 1124毫米
    高度 标称6.3英寸（160毫米），
    SEM-Base关闭时不会改变
    工作温度 50° - 90° F
    10° - 32° C
    储存温度 -40° - 130° F
    -40° - 55° C
    湿度 80% at 20o C, Max dewpoint: 18o C
    系统电源要求 100、120、230、240 VAC
    50/60 Hz AC； <600 W
    符合CE标准
    地面位移 <800 μin. (20 μm) below 10 Hzd>
    内置控制器规格
    处理器 150/75 MHz双核
    采样率 10 kHz
    模拟输出 16个通道
    模拟输入 16个通道
    状态灯 单个LED
    前面板端口 1个串行USB 2.0
    1个串行Micro-USB
    1个以太网RJ-45
    2个BNC
    用户界面 前面板液晶显示屏
    超级终端上的字符菜单
    适用于Microsoft Windows的扩展GUI
    嵌入式以太网GUI

  • Video +

  • To Order +


    Contact TMC. An Application Engineer will configure a system for your unique requirements and provide a quotation.
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