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OEM Integrated Solutions

  • Vibration cancellation for semiconductor moving stage tools
    Stage-Base™

    TMC’s Stage-Base™ 450 is specifically designed to be the primary vibration cancellation system for advanced semiconductor tools which incorporate high-precision motorized X-Y stages. With the addition of VCM with feed-forward control for even faster settling time to further increase throughput, the result is the most advanced Active Vibration and Motion Cancellation system for moving stage applications.

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