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STACIS Compact Quiet Island

Compact Quiet Island

  • Overview +


    Similar to the standard STACIS Quiet Island, this Compact version provides excellent sub-Hertz active floor vibration cancellation for large instruments that typically weigh over 1134 kg (2,500 lbs.).

    Whereas the standard Quiet Island requires a raised floor or pit with a depth of at least 380 mm (15 in.), Compact Quiet Island utilizes STACIS IIIc low-profile isolators and custom pocketed platforms to match raised floor heights as low as 200 mm (7.86 in.).

    The images below illustrate the height comparison between the standard and Compact Quiet Island heights.

    Quiet Island comparison wide Quiet Island comparison detail

  • To Order +


    Because of the complexity, sensitivity, and value of the equipment installed on our Quiet Island® Sub-Floor Platforms, we do not maintain standard catalog numbers for ordering. We consider each installation to be a custom-engineered solution. The recommended procedure for ordering is as follows:

    • Tell us what equipment or instrument you want to isolate. Because of our installed base, it is likely that we have already engineered a platform design to the requirements of your application. In addition, we maintain close contact with stepper, aligner, SEM, and other tool manufacturers to keep current with size, shape, weight changes, and floor vibration specifications.
    • Alternatively, you may want a system to fit within the raised floor grid system. Specifiers often opt for a 47 x 47 in. (1,190 x 1,190 mm) platform to replace an even number of floor tiles.
    • Tell us the height of your raised floor above the solid sub-floor.
    • Describe to us or provide an illustration showing any hole pattern in your sub-floor or the steel beam/waffle slab geometry.
    • Provide us with floor vibration data or discuss with us how to arrange to have this data measured.
    • Consider the vibration sensitivity of the instrument. Many tools are adequately supported by our rigid, non-resonant post design. More sensitive applications will require air or piezo support
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