Up to 42% reduction in isolator height, compared to the regular STACIS III system with no reduction in performance.
Hundreds of times stiffer than air isolators, STACIS suffers from none of the limitations of air vibration isolation systems. There is no "soft" suspension and, unlike active air systems, STACIS can be placed beneath a tool with an internal active air isolation system with both systems fully optimized.
The unique serial design and proprietary high-force piezoelectric technology
results in a wide active bandwidth from 0.6 Hz to 150 Hz and unmatched, truly active vibration isolation with 90% vibration reduction starting at 2 Hz.