System Offers Most-Advanced Vibration and Motion Cancellation Technology
For Semiconductor Tools with Motorized Stages
Peabody, MA, — TMC, an industry leader in high-performance
vibration and motion cancellation technology, has introduced Stage-Base™ 450, its next
generation of frame-mountable, active vibration and motion cancellation systems
designed to control building floor vibration in semiconductor facilities, while increasing
wafer-processing throughput
TMC is the first and only solutions provider to integrate unique serial-type
architecture with voice coil technology into a system for aggressive moving-stage
motion cancellation. Its Stage-Base 450 system is specifically designed to be the
primary vibration cancellation system for semiconductor tools that incorporate highprecision
motorized X-Y stages.
While such tools require extremely efficient vibration isolation, they just as
critically require that payload motion induced by the moving stage settle very quickly to
maximize tool throughput. By adding voice coil motor technology to TMC’s highly
advanced STACIS® system, Stage-Base 450 (patent pending) provides a 4x
improvement in settling time over TMC’s previous generation STACIS® iX StageBase™.
“TMC continues to apply the latest technological advances in developing new
solutions for the challenging demands that semiconductor tools place on their vibration
isolation systems. Stage-Base 450, with STACIS inside, is truly unique in our industry,”
states Wes Wigglesworth, TMC Product Manager, Active Systems.
“This is the only commercial solution that provides active floor vibration
cancellation starting at 0.6Hz increasing to a 10-to-1 reduction by 2Hz with voice coil
technology in a compact, reliable system to dramatically reduce the impact of stage
motion on wafer processing,” he adds.
Like its predecessor, Stage-Base 450 incorporates TMC’s unique STACIS
technology. The serial-type architecture of STACIS allows TMC to use a very stiff spring
to support the payload. This is very desirable due to the much lower initial deflection in
response to stage forces compared to softer springs. The proven piezoelectric active
cancellation technology in STACIS delivers vibration cancellation starting at the lowest
frequency commercially available.
With the addition of optional voice coil motors with feed-forward control for even
faster settling time, Stage-Base 450 is the most advanced active vibration- and motioncancellation
system available for tools with moving stages.
TMC designs and manufactures precision vibration isolation systems for
sensitive research and manufacturing processes worldwide. The Company’s ISO
9001:2008-certified products include active and passive vibration isolation systems;
optical tops, optical table systems, and breadboards; laboratory tables and table top
platforms; floor platforms; magnetic field cancellation and electric field shielding
systems; and acoustic enclosures
TMC is a unit of AMETEK Ultra Precision Technologies, a pioneer in the
development of ultra-precision measurement instruments and a global leader in ultraprecise
machine tools and manufacturing systems for the semiconductor, photovoltaic,
nanotechnology, military, defense and ophthalmic lens markets
AMETEK Ultra Precision Technologies is a division of AMETEK, Inc., a leading
global manufacturer of electronic instruments and electromechanical devices with
annual sales of $4.0 billion. For more information, contact Steven T. Ryan at Technical
Manufacturing Corporation, 15 Centennial Drive, Peabody, MA 01960. Tel: 978-532-
6330. Fax: 978-531-8682. E-mail: steve.ryan@ametek.comWebsite:
www.techmfg.com